| 000 | 01002cam a2200277 i 4500 | ||
|---|---|---|---|
| 005 | 20220224111634.0 | ||
| 008 | 131030s2013 xxua 000 0 eng | ||
| 020 | _a9781466515819 (empastado, cubierta dura) | ||
| 020 | _a1466515813 (empastado, cubierta dura) | ||
| 035 | _aMX001001626953 | ||
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_a621.381 _223 |
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_aMEMS : _bfundamental technology and applications / _cedited by Vikas Choudhary, Krzysztof Iniewski |
| 264 | 1 |
_aBoca Raton : _bCRC Press,Taylor & Francis Group, _cc2013 |
|
| 300 |
_axxii, 456 páginas : _bilustraciones |
||
| 490 | 0 | _aDevices, circuits, and systems | |
| 650 | 0 | _aSistemas microelectromecánicos | |
| 650 | 0 | _aEncapsulado microelectrónico | |
| 700 | 1 |
_aChoudhary, Vikas, _eautor |
|
| 700 | 1 |
_aIniewski, Krzysztof, _d1960- _eeditor |
|
| 336 |
_atexto _2rdacontent |
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| 337 |
_asin medio _2rdamedia |
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| 338 |
_avolumen _2rdacarrier |
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| 999 |
_c8947 _d8947 |
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